BEGIN:VCALENDAR
VERSION:2.0
PRODID:Linklings LLC
BEGIN:VTIMEZONE
TZID:America/Los_Angeles
X-LIC-LOCATION:America/Los_Angeles
BEGIN:DAYLIGHT
TZOFFSETFROM:-0800
TZOFFSETTO:-0700
TZNAME:PDT
DTSTART:19700308T020000
RRULE:FREQ=YEARLY;BYMONTH=3;BYDAY=2SU
END:DAYLIGHT
BEGIN:STANDARD
TZOFFSETFROM:-0700
TZOFFSETTO:-0800
TZNAME:PST
DTSTART:19701101T020000
RRULE:FREQ=YEARLY;BYMONTH=11;BYDAY=1SU
END:STANDARD
END:VTIMEZONE
BEGIN:VEVENT
DTSTAMP:20260730T152640Z
LOCATION:Exhibit Hall
DTSTART;TZID=America/Los_Angeles:20260728T175500
DTEND;TZID=America/Los_Angeles:20260728T175500
UID:dac_DAC 2026_sess306_WIP3295@linklings.com
SUMMARY:Etch-ViGen: A Video Generation Model for Etching Simulation
DESCRIPTION:Li Ding, Zhenjie Yao, Lingfei Wang, Rui Chen, Zhiqiang Li, and
  ling li (IMECAS)\n\nWith the scaling down of integrated circuit dimension
 s and the increasing complexity of transistor structures, the role of etch
 ing in manufacturing has become increasingly critical. We propose an etchi
 ng simulation approach based on a video generation model, which models the
  evolution of the etching process as a video generation task. By embedding
  frames into quantized latent codeword representations by VQ-VAE (Vector Q
 uantized Variational Autoencoder) and leveraging a temporal autoregressive
  prediction model, we achieve generation model of the etching process. On 
 both simulated and experimental data, we validate the effectiveness of our
  model. Our approach achieves a 6,000× speedup over the Monte Carlo method
  while reducing the simulation MAE (Mean Absolute Error) by 14.4% compared
  with the state-of-the-art video generation model. Furthermore, results ge
 nerated by our video based model show strong agreement with experimental d
 ata.\n\nTrack: Student\n\n
END:VEVENT
END:VCALENDAR