Presentation
Etch-Vigen: A Video Generation Model for Etching Simulation
DescriptionWith the scaling down of integrated circuit dimensions and the increasing complexity of transistor structures, the role of etching in manufacturing has become increasingly critical. We propose an etching simulation approach based on a video generation model, which models the evolution of the etching process as a video generation task. By embedding frames into quantized latent codeword representations by VQ-VAE (Vector Quantized Variational Autoencoder) and leveraging a temporal autoregressive prediction model, we achieve generation model of the etching process. On both simulated and experimental data, we validate the effectiveness of our model. Our approach achieves a 6,000× speedup over the Monte Carlo method while reducing the simulation MAE (Mean Absolute Error) by 14.4% compared with the state-of-the-art video generation model. Furthermore, results generated by our video based model show strong agreement with experimental data.
Event Type
Work in Progress
TimeMonday, July 276:48pm - 6:49pm PDT
LocationExhibit Hall
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