Presentation
Isolated Lightning Rod Diode Structure for Process-Induced Discharge (PID) Dissipation to Reduce Leakage on Integrated Passive Device (IPD)
DescriptionWe propose a novel protection diode architecture (aka lightning rods) that enables process-induced discharge while eliminating the leakage current induced due to protection diode placement. The lightning rods are placed on the periphery of the die, outside of the Integrated Passive Devices (IPD) circuitry, hence eliminating the leakage path between the capacitor electrodes and the protection diodes. Historically, protection diodes need to be placed in the active region of the Integrated Passive Devices (IPD) such as capacitors, inductors, heat elements, resistive temperature detectors (RTD), interposers, IO connectors (e.g. EMIB) to allow for process-induced discharge. Process-induced charging is proportional to the floating metal cumulative area. When the charge accumulation reaches a certain level, discharge occurs often leading to defects like burn mark/void /metal shorting etc. Protection diodes are typically connected to the metal plates to eliminate the defects due to process-induced discharge (PID), and hence diode becomes part of the active circuitry and increases current leakage. Therefore, placing the protection diodes in the vicinity of the active circuit but not directly connected to it eliminates leakage. In this case, these protection diodes act as lightning rods, similar to atmospheric discharge through lightning rods.
Event Type
Engineering Poster
TimeWednesday, July 293:00pm - 4:00pm PDT
LocationDAC Pavilion, Exhibit Floor
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